Steaming device
Maker Canon Anelva
Model L-045E
Model year 2010
External Dimensions W1100 D700 H1650
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number N80313
Mechanical Specifications
Can store one 3-inch SI wafer
Maximum input power: 10kW
Crucible 11mL (φ29xφ24xD20) x 6
Vacuum chamber W400 H660 (pentagonal)
3φ 200V 50/60Hz 60A
Attachments
※ Click on the image below to zoom in.
