Stylus-type step thickness gauge
Maker KLA Tencor
Model Alpha-Step IQ
Model year
External Dimensions W1100 D800 H1270
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number N50550
Mechanical Specifications
Stylus type (stage drive, stylus fixed)
Vertical resolution/measurement range: 1Å/±6.5μm, 5Å/32μm, 25Å/±300μm
Step measurement repeatability: 8Å (13μm range)
Scanning distance: Max. 60mm
Scanning speed: 1μm/sec-25mm/sec
Sampling rate: 50, 100, 200, 500, 1000 points/sec
Sample size: Maximum 254mm
Access range: Maximum 152mm
Shooting camera Side view: 95-410x, Top view: 115-465x
Power supply: Single phase AC100-240V 50/60Hz 1.35A
External dimensions: W430 D660 H290
*PC set included (booting confirmed)
DELL OPTIPLEX GX360
OS Windows XP Pro 2002 SP3
CPU DualCore E5300 2.6GHz
Memory 1GB HDD 80GB
*Precision vibration isolation table (S table60C-110) included
Attachments
※ Click on the image below to zoom in.
