naver-blog youtube

Stylus-type step thickness gauge

Maker KLA Tencor

Model Alpha-Step IQ

Model year

External Dimensions W1100 D800 H1270

Exhibition hall Enzan Technical Center

price Price on request

Inquiry Number N50550

Mechanical Specifications

Stylus type (stage drive, stylus fixed)

Vertical resolution/measurement range: 1Å/±6.5μm, 5Å/32μm, 25Å/±300μm

Step measurement repeatability: 8Å (13μm range)

Scanning distance: Max. 60mm

Scanning speed: 1μm/sec-25mm/sec

Sampling rate: 50, 100, 200, 500, 1000 points/sec

Sample size: Maximum 254mm

Access range: Maximum 152mm

Shooting camera Side view: 95-410x, Top view: 115-465x

Power supply: Single phase AC100-240V 50/60Hz 1.35A

External dimensions: W430 D660 H290

*PC set included (booting confirmed)

DELL OPTIPLEX GX360

OS Windows XP Pro 2002 SP3

CPU DualCore E5300 2.6GHz

Memory 1GB HDD 80GB

*Precision vibration isolation table (S table60C-110) included

Attachments

첨부 파일 확인

※ Click on the image below to zoom in.