Sputtering Equipment
Maker Shibaura Mechatronics
Model CFS-4EP-LL
Model year 2001
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number N30392
Mechanical Specifications
Processing volume: within φ200mm (effective φ170mm)
Number of targets: 3 x 4in cathodes
T1 (DC power supply only), T2 (DC power supply only), T3 (RF power supply only)
Reverse sputtering mechanism available
Jig heating: MAX 300℃
Input power supply: 3φAC200V 8kVA
Attachments
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