Quartz crystal oscillator type deposition controller
Maker ULVAC
Model CRTM-9000
Model year
External Dimensions W480 D360 H150
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number N10762
Mechanical Specifications
Includes 4 sputtering sensors
Frequency range: 3.0 to 5.01MHz, 4.0 to 6.01MHz
Measurement resolution 0.003Hz Display resolution 0.001MHz
Sampling rate 250ms Film thickness range 0 to 99.99μm
Deposition rate range: 0 to 99.104 nm/s
Power supply 3 phase AC85~264V 50/60Hz 60W
Attachments
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