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Quartz crystal oscillator type deposition controller

Maker ULVAC

Model CRTM-9000

Model year

External Dimensions W480 D360 H150

Exhibition hall Enzan Technical Center

price Price on request

Inquiry Number N10762

Mechanical Specifications

Includes 4 sputtering sensors

Frequency range: 3.0 to 5.01MHz, 4.0 to 6.01MHz

Measurement resolution 0.003Hz Display resolution 0.001MHz

Sampling rate 250ms Film thickness range 0 to 99.99μm

Deposition rate range: 0 to 99.104 nm/s

Power supply 3 phase AC85~264V 50/60Hz 60W

Attachments

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