Wafer surface inspection equipment

Maker Takano

Model WM-10

Model year 2019

External Dimensions W1272 D1213 H1650

Exhibition hall Enzan Technical Center

price Price on request

Inquiry Number MA0110

Mechanical Specifications

Features: High-output Violet-LD, maximum detection sensitivity of 48 nm

Ideal for mass production and prototyping of 90 to 65 nm process nodes

Light source: VioletLD

Detection/scanning method: Scattered light detection/spiral scanning method

Scattered light detection/spiral scanning method: Bare 48 nm/Film 60 nm

Wafer size: 300/200mm compatible

Input power: 1φ200-240V 50/60Hz 30A

Attachments

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