Regulator
Maker SMC
Model SRH3100-02
Model year
External Dimensions 43x43x81
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number M90627
Mechanical Specifications
Set pressure: 0.02 to 0.2 MPa
Body size: 1/4
Connection size: Rc1/4
Parts used in ULVAC sputtering equipment: SRH-420
Unused item
Attachments

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