Cryo Compressor
Maker ULVAC
Model C10
Model year ー
External Dimensions 330×550×580
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number M90561
Mechanical Specifications
Power supply: 3-phase 200V 1.5KW(50HZ)
1.7KW(60HZ) Cooling water temperature: 5～32℃
Water volume: 2 to 6 L/min
Compatible cryopumps: U4H / U6H / U8H
Accessories: None (main unit only)
Accumulation time: 108152.9Hr
Helium residual pressure: 1.51MPa
Attachments
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