Cryopumps
Maker ULVAC
Model CRYO-U6H
Model year ー
External Dimensions ф235 305×510
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number M90560
Mechanical Specifications
Intake port: VG150 (outer diameter: 235 mm)
Ultimate pressure: 10-7Pa
Compatible compressors: C10, C10AT, C10ES
Accessories: None (main unit only) P/N 8120663G001
Attachments
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