Prover
Maker Tokyo Precision (TSK)
Model UF200
Model year 2000.2
External Dimensions W1150 D1130 H1740
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number M40976
model UF200
year 2000.2
-> Machine specification Compatible wafer: 5, 6, 8 inches
XY axis: Proving area ± 120mm
Maximum speed 200mm/s
Z Axis: Full Stroke 69mm
Air supply: 0.4MPa or more
Vacuum: -53kpa or higher
Power: 200V 50/60Hz 1.5kva
Attachment
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