Step and film thickness measuring device
Maker KLA Tencor
Model AS-500(Alpha-Step 500)
Model year 1997
External Dimensions W490 D790 H670
Exhibition hall etc
price Price on request
Inquiry Number M40643
Mechanical Specifications
Power supply: 90 to 110V, 50/60Hz, Measurement: Stylus type, Vertical resolution: 1Å/±6.5μm, Measurement range: 25Å/±150μm, Operation distance: 10mm, Operation speed: 2 to 200μm/sec, Sample size/Access range: Maximum 162mmΦ, Camera: 70 to 210x
*Some repairs required
Attachments
※ Click on the image below to zoom in.
