Ashing device NG
Maker Tokyo Ohka
Model OPM-A1250A
Model year 1985
External Dimensions 700x1300x1700
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number M20435
Mechanical Specifications
Wafer size: Φ5in
High frequency power supply: 13.56MHz/1000W crystal oscillator
Chamber size: φ300x500L
3φ200V 1φ200V 1φ100V
Attachments
※ Click on the image below to zoom in.
