Dry Etching Equipment
Maker ULVAC
Model RH-3030P
Model year 1992
External Dimensions 1700x1550x2000
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number L70775
Mechanical Specifications
Material: Ceramic
Board electrode size
Etching electrode 500Lx500W(mm)
Counter electrode 500Lx500W
Etching conditions: Parallel plate type (face up)
Board to board distance: 30 to 80 mm
Power supply: 3KW (1356MHz)
Heating mechanism RF electrode 5 to 45°C
3φ 200V 50Hz
Attachments
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