Sputtering Equipment
Maker Canon Anelva
Model E-401S
Model year 2008年10月
External Dimensions 1500x2200x2050
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number L70635
Mechanical Specifications
4-inch x 5-sheet tray specification Cassette 5-tier
Spatter down method
Automatic coating, maximum diameter 220mm
Static opposing deposition Max. φ100mm
Equipped with 4 φ4 magnet cathodes
RF 2-target simultaneous sputtering possible
Distance between substrate and electrode can be changed (motor driven)
Maximum substrate heating temperature: 300°
3φ200V±10% 100A 50/60Hz
Attachments
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