CVD equipment (main unit only)
Maker Tokyo Electron Limited
Model MB2-730
Model year 1998
External Dimensions 1800x2600x2200
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number L70596
Mechanical Specifications
Gas used: N2, Ar, WF6, CIF3, DCS
190-220VAC 50/60Hz
Attachments

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