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CVD equipment (main unit only)

Maker Tokyo Electron Limited

Model MB2-730

Model year 1998

External Dimensions 1800x2600x2200

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number L70596

Mechanical Specifications

Gas used: N2, Ar, WF6, CIF3, DCS

190-220VAC 50/60Hz

Attachments

※ Click on the image below to zoom in.