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CVD equipment

Maker Tokyo Electron Limited

Model MB2-730

Model year 2002

External Dimensions 1800x2800x2200

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number L70595

Mechanical Specifications

Inch size: 8

Gases used: N2, Ar, H2, WF6, CIF3, SiH4

190-220VAC 50/60Hz

Attachments

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