CVD equipment
Maker Tokyo Electron Limited
Model MB2-730
Model year 2002
External Dimensions 1800x2800x2200
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number L70595
Mechanical Specifications
Inch size: 8
Gases used: N2, Ar, H2, WF6, CIF3, SiH4
190-220VAC 50/60Hz
Attachments

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