Excimer irradiation equipment
Maker Quark Technology
Model QEFSA4-172
Model year
External Dimensions W930 D850 H1340
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number L60147
Mechanical Specifications
Work size: 300 x 200
Excimer power supply: Quark Technology (QFP-1.2AN)
Input power: 3φAC200V 50/60Hz
Attachments
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