Sputtering Equipment
Maker ULVAC
Model MLH-2304
Model year
External Dimensions 1600x1200x1700
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number L40584
Mechanical Specifications
4-inch cathode 3-way sputter DOWN
Cryopump: U-10PU/C30
Sputtering power supply: MDX-052/MDX-5K (5KW)
Infrared lamp heating
Process gas: Ar * Parts only machine
Attachments
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