Excimer irradiation equipment
Maker Filgen
Model UV172ーEX
Model year
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number L20210
Mechanical Specifications
W900 D750 H1250
UV253H1207 (main unit): 100V 50/60Hz 4 lamps
Straight tube excimer lamp Wavelength 172nm W580 D530 H580
B0026B (light source): 100V 50/60Hz W430 D360 H160
LTC-450 (chiller): Gas used: R407C 165g
100V 50/60Hz 5A 28Kg
100V 50/60Hz
Attachments
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