Ion sputtering equipment
Maker Hitachi, Ltd.
Model E-1030
Model year
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number K10362
Mechanical Specifications
Single phase 100V 50/60Hz 15A Sample maximum Φ55mm
Maximum height 20mm
Sample stage: Approx. φ60 W450 D360 H380 Weight: Approx. 56kg
Rotary Pump ULVAC GLD-135C
Attachments
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