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EB power supply (crucible only)

Maker ULVAC

Model HPS-1000F

Model year

External Dimensions

Exhibition hall Enzan Technical Center

price Price on request

Inquiry Number JC0525

Mechanical Specifications

[EB power supply HPS-1000F] (Input power supply) 3-phase 190~231V 50/60Hz 14kVA or less (Output) -4kVA~-10kVA 0~1000mA (External dimensions) W500 D700 H710 (Weight) 115kg [Controller EGC-10S] (External dimensions) W480 D540 H149 (Weight) 20kg [Evaporation source EGL-35M] Acceleration voltage) DC -4kVA~-10kVA (Emission current (MAX)) 1.0A MAX (at-10kV) (Crucible) Dimensions (40cm3) 50 .41 .H25 x 2 locations (10cm3) 32 .24. H15 x 2 locations Total 4 locations (Maximum input power) (40cm3n) 10kW (10cm3) 6kW (External dimensions) W170. D250. H156 (Weight) 18kg

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