Dry Etching Equipment (ICP)
Maker ULVAC
Model NE-730
Model year 2001
External Dimensions
Exhibition hall etc
price Price on request
Inquiry Number J70483
Mechanical Specifications
External dimensions: W1800, D1400, H1650, Weight: 1200kg
Control external dimensions: W700 D1100 H2250 (2000 without patrol)
TMP: Shimadzu 800L, RF power supply: 2 units (200W, 500W)
Chiller: 1 unit (RISSHI CS-400SW-L)
Dry pump: 3 units
Breakdown: Kashiyama SD60VⅡ (1 unit), HC60B-1 (2 units)
Attachments
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