Sputtering Equipment
Maker Anelva
Model L-332S-FH
Model year 1998
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number I80030
Mechanical Specifications
[Control number: I80030] L-332S-FH Anerva
Number of targets: 3 inc x 3, board size: 2 inches
Sputtering power supply: DC power supply & RF power supply
Device size: W1800×D1050×H1800
Sputtering power supply: PRF-065B/MDX-500W
Input: 3φ200V 50/60Hz
EVP-32189
Attachments
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