Sputtering Equipment
Maker Showa Vacuum
Model SPH-2207-RF
Model year 2008
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number I70643
Mechanical Specifications
Target size: 126mm x 178mm x 6t
Number of targets: 1, Board size: φ3 inches
Number of boards that can be mounted: 4 boards x 10
Sputtering power supply: RF power supply
Base heating temperature: MAX 150℃
External dimensions: W2500D1100H1850
[Control number: I70643] SPH-2207-RF Showa Vacuum
Power supply: 3-phase 200V 50/60Hz 23.8KVA
Ultimate pressure: Loading/unloading chamber 1.0×10?3 Pa or less, sputtering chamber 1.0×10?3 Pa or less, sputtering material Ag,
Sputtering transport speed: 100-1000mm/min
External dimensions: Main unit W2500D1100H1850
Power rack W640D800H1850, target dimensions 126mm x 178mm x 6t, substrate heating temperature MAX 150℃
Attachments
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