Assessing device
Maker International Electric Semiconductor Service
Model RAM-6500R
Model year 2011
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number I70574
model ram-6500R
year 2011
-> Machine specification Power: 3 phase 200V 15kVA 50Hz/60Hz <>
1/3: Assing device body W600XD1300XH1790 Wafer size 5 inches (can be changed to 4 inches) 50 chambers/batch RF power supply 1kw 13.56MHz Auto tuning
2/3: Control Console W570XD700XH1400
3/3: EBARA EV-N100S W280XD600XH580 Exhaust speed 10000L/min
Ishikitsu Tube 1 missing
Attached file Attachment Cock Seat
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