Dry Etching Equipment
Maker Tokyo Ohka Kogyo
Model TCE-3822
Model year 2011
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number I70530
Mechanical Specifications
Serial number T-1108729
Power supply: 3-phase 200V 125A 60Hz
1/2: Etching equipment body, compatible with Φ125 wafers, 2 quartz chambers
2/2: Control rack KYOSAN matching controller (MAK5) 1KW RF power supply Water leak detector (WR-NA)
Dry pump sold separately
*PC board is not working (repair or replacement required)
Attachments
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