Turbomolecular Pump Set
Maker Shimadzu Corporation
Model TMP-803LM/EI-D1003M
Model year 2004年8月
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number I70451
Mechanical Specifications
【1/3】TMP (PUMP)
Ultimate pressure: 10-9Pa
Rotation speed: 35000rpm Exhaust speed: 800L/S
Weight: 31kg with cooling water jacket
Air intake: ISO160BF (diameter 225mm/8 holes)
Exhaust port: NW40
[2/3] Controller
Power supply: Single phase 200-240V 8Kg
【3/3】
Control cable 1.5m
Attachments
※ Click on the image below to zoom in.
