Sputtering equipment (CtoC) Single wafer type
Maker Anelva
Model C-7960FL
Model year 1998
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number HB1176
Mechanical Specifications
Target size: φ318×4t, Number of targets: 4
Board size: 6 inches, Number of boards that can be mounted: 7
Sputtering power supply: RF power supply 5kw
This equipment is a single-wafer automatic coating equipment.
Vacuum performance 1. Sputtering chamber ultimate pressure 8x10??Pa or less
2. Transfer chamber ultimate pressure 9.9x10??Pa or less
3. Load lock chamber ultimate pressure 9.9x10??Pa or less
Attachments
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