Dry Etching Equipment
Maker Tokyo Ohka Kogyo
Model TCE-3822
Model year 2011
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number H60706
Mechanical Specifications
Serial number T-1109735
Power supply: 3-phase 200V 125A 60Hz 1/2: Etching equipment main unit Φ125 wafer compatible quartz chamber x 2 2/2: Control rack KYOSAN matching controller (MAK5) 1KW RF power supply Water leak detector (WR-NA)
Pump not included W1000 D1850 H2030, Power supply W600 D1000 H1200
*A cassette transport cover not included
*PC board is not working (repair or replacement required)
Attachments
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