Cryopumps
Maker ULVAC
Model CRYO-U12HSP
Model year
External Dimensions
Exhibition hall Tsuru Technical Center
price Price on request
Inquiry Number G80176
Mechanical Specifications
Pumping speed 4100L/S Flange outer diameter φ400mm
Exhaust speed (20℃): Ar 3,300L/s
Ultimate pressure: 10-7(10-9)Pa(Torr)
Maximum flow rate: Ar_2.0×103(15)Pa・L/s(Torr・L/s)
Pumping capacity: Ar_2.1×108 (1.6×106) Pa・L (Torr・L)
Cooling down time: 85/75(50/60)min(Hz)
Inlet flange: VG300
Mass: 40 kg
Attachments
※ Click on the image below to zoom in.
