Spatta device
Maker Panasonic Production engineering
Model
Model year 2015
External Dimensions
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number G20202
model
year 2015
-> Machine specification [Management number: G20202] Panasonic
Target size: φ300mm, target number: 1
Baseboard size: 8 inches, number of substrates can be attached: 1
Power for spatta: DC power 5kw
Equipment size (body part) W800D1120H1555
Specification target: CR process gas: AR made in April 2015
Attachment Attacheds://askindex.co.jp/stocks/uploads/g2/g20202/g20202.pdf"> a>
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