Etching equipment - Samco RIE-300NR
Product Specifications
Maker Samco
Model RIE-300NR
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W850 D2050 H2100（本体）
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P31177
Mechanical Specifications
Power supply: φ3 200V 50/60Hz 50A
High frequency power supply: 13.56MHz 1kw
Quartz tray: 3 inch x 9 pieces (1 batch) 4 inch x 6 pieces (1 batch)
Gas type: O2/500ccm Ar/200ccm CF4/200ccm
N2 gas: 0.1MPa 1/4inch SWL
Air: 0.5MPa 1/4inch SWL
Exhaust system: Turbo pump (1000L/s) Shimadzu Corporation
Dry Pump (1300/s) Kashiyama Kogyo
Attachments
Product Overview
Samco RIE-300NR is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W850 D2050 H2100（本体）. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
※ Click on the image below to zoom in.