Dry Etching Equipment - Showa Vacuum SPE-2010
Product Specifications
Maker Showa Vacuum
Model SPE-2010
Category Semiconductor (Pre-process)
Model year 2004
External Dimensions （本体）W1000 D1100 H1600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O51140
Mechanical Specifications
Power supply: φ3 200V 16.7KVA 60Hz
Cooling water: 0.2Mpa 0.96m3/h
Air pressure: 0.5Mpa
RF power: 13.56MHz (Max500W)
MP: VG203VA / Osaka Vacuum (2.7x10-3Pa or less)
Board size: φ3 inch (orientation flat)
Gases used: Ar, O2, CHF3
Etching method: Reactive etching
Attachments
Product Overview
Showa Vacuum SPE-2010 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: （本体）W1000 D1100 H1600. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Showa Vacuum) and the same category (Semiconductor (Pre-process)).
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