Sputtering device - ULVAC SH-350
Product Specifications
Maker ULVAC
Model SH-350
Category Semiconductor (Pre-process)
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number JC0375
Machine specifications
[Power Supply] 200V 18.4kVA [Required Cooling Water] 2.8ℓ/min [Required Air Pressure] 6-7kg/cm² [Gas Used] Ar, O2, N2 [Substrate Electrode] Φ350 Turntable Type Water-Cooled Etching Table [Sputtering Method] Depot Down [Multi-Cathode] Up to 3 [Cathode] 5-inch Planar Magnetron Cathode (Non-magnetic) [External Dimensions] Main Unit W900.D1650.H1650 Control Panel W560.D1100.H1850 [Weight] Main Unit 800kg
Attached file
Product Overview
ULVAC SH-350 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
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