Sputtering Equipment - Showa Vacuum SPH-2207-RF
Product Specifications
Maker Showa Vacuum
Model SPH-2207-RF
Category Semiconductor (Pre-process)
Model year 2008
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number I70643
Mechanical Specifications
Target size: 126mm x 178mm x 6t
Number of targets: 1, Board size: φ3 inches
Number of boards that can be mounted: 4 boards x 10
Sputtering power supply: RF power supply
Base heating temperature: MAX 150℃
External dimensions: W2500D1100H1850
[Control number: I70643] SPH-2207-RF Showa Vacuum
Power supply: 3-phase 200V 50/60Hz 23.8KVA
Ultimate pressure: Loading/unloading chamber 1.0×10?3 Pa or less, sputtering chamber 1.0×10?3 Pa or less, sputtering material Ag,
Sputtering transport speed: 100-1000mm/min
External dimensions: Main unit W2500D1100H1850
Power rack W640D800H1850, target dimensions 126mm x 178mm x 6t, substrate heating temperature MAX 150℃
Attachments
Product Overview
Showa Vacuum SPH-2207-RF is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Showa Vacuum) and the same category (Semiconductor (Pre-process)).
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