Dry Etching Equipment - Showa Vacuum SPE-2010
Product Specifications
Maker Showa Vacuum
Model SPE-2010
Category Semiconductor (Pre-process)
Model year 2001
External Dimensions W1000D1100H1600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number I70641
Mechanical Specifications
1/4 Etching Equipment (SPE-2010): Power supply: 3-phase 200V 50/60Hz 12KVA, compressed air 0.5MPa 20L/min, N2 gas 0.3MPa/min, 3-inch compatible, ultimate pressure 2.7x10?3Pa, exhaust time to 3.0x10?2Pa within 2 minutes, etching depth 60nm
External dimensions: W1000D1100H1600 Weight: 1000kg
2/4 Chiller: NESLAB M75 3/4 Rotary Pump: ALCATEL2012A/2033 C2 (2 units) 4/4 RF Power Supply (T857-2) MAX 500W 13.56MHz
Attachments
Product Overview
Showa Vacuum SPE-2010 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W1000D1100H1600. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Showa Vacuum) and the same category (Semiconductor (Pre-process)).
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